Cảm biến khí sử dụng TiO2

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Sensors 2010, 10, 670-683; doi:10.3390/s100100670

ISSN 1424-8220


A Macroporous TiO2 Oxygen Sensor Fabricated Using Anodic
Aluminium Oxide as an Etching Mask
Chih-Cheng Lu 1,*, Yong-Sheng Huang 1, Jun-Wei Huang 1, Chien-Kuo Chang 2 and
Sheng-Po Wu 1


Institute of Mechtronic Engineering, National Taipei University of Technology, Taipei 106, Taiwan;
E-Mails: t7408047@ntut.edu.tw (Y.-S.H.); cooljunwei@hotmail.com (J.-W.H.);
t7408021@ntut.edu.tw (S.-P.W.)
Graduate Institute of Mechanical and Electrical Engineering, National Taipei University of
Technology, Taipei 106, Taiwan; E-Mail: chiean-kuo@yahoo.com.tw

* Author to whom correspondence should be addressed; E-Mail: cclu23@ntut.edu.tw;
Tel.: +886-2-2771-2171 Ext. 2067; Fax: +886-2-8773-1890.
Received: 10 December 2009; in revised form: 1 January 2010 / Accepted: 12 January 2010 /
Published: 19 January 2010

Abstract: An innovative fabrication method to produce a macroporous Si surface by
employing an anodic aluminium oxide (AAO) nanopore array layer as an etching template is
presented. Combining AAO with a reactive ion etching (RIE) processes, a homogeneous
and macroporous silicon surface can be effectively configured by modulating AAO process
parameters and alumina film thickness, thus hopefully replacing conventional
photolithography and electrochemical etch methods. The hybrid process integration is
considered fully CMOS compatible thanks to the low-temperature AAO and CMOS
processes. The gas-sensing characteristics of 50 nm TiO2 nanofilms deposited on the
macroporous surface are compared with those of conventional plain (or non-porous)
nanofilms to verify reduced response noise and improved sensitivity as a result of their
macroporosity. Our experimental results reveal that macroporous geometry of the TiO 2
chemoresistive gas sensor demonstrates 2-fold higher (~33%) improved sensitivity than a
non-porous sensor at different levels of oxygen exposure. In addition, the macroporous
device exhibits excellent discrimination capability and significantly lessened response noise
at 500 C. Experimental results indicate that the hybrid process of such miniature and
macroporous devices are compatible as well as applicable to integrated next generation
bio-chemical sensors.

Sensors 2010, 10


Keywords: anodic aluminium oxide (AAO); macroporous; MEMS; TiO2 gas sensor

1. Introduction
With the rapid evolution of microelectronic and microelectromecha...
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