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Cleanroom Technology Handbook

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Cleanroom Technology

2

Editorial
Changes in industrial production have also resulted in
changes in the prevailing
environmental conditions. The
demand for quality has risen
and the reduction of costs has
now become the essential
criterion. Cleanroom production
offers considerable potential
here – as long as it is used
properly.
The more sensitive the item to
be produced, the “cleaner” the
production method required.
Production in cleanrooms or
using cleanroom technology
has become increasingly
popular. However, it is not
always immediately obvious
what is actually behind it, never
mind how it should be used.
Even the concepts used to
describe it are often difficult to
understand and unclear.
Let us start with the concept of
the cleanroom. The only
possible method of cleanroom
comparison is based on the
number of airborne particles
relative to a volume equivalent.
The VDI Guideline 2083 and the
US Federal Standard 209E have
made a start by defining international standards for cleanliness classes.

One of the main factors that
influences air cleanliness is the
equipment installed in a cleanroom. As a supplier of automation expertise Festo has
been concerned with this subject for over ten years. Back
then the number of customers
in this specialized area was
small. That has since changed.
The propagation of high-tech
chip development facilities, for
example, has resulted in a clear
increase in cleanroom production.
The purpose of this manual is
to provide solutions to specific
problems in the area of cleanroom technology. Our aim was
to produce a comprehensive
work containing all relevant
information to serve as a
valuable reference source.
We are grateful to the Institute
for Production Technology and
Automation (IPA) at the
Fraunhofer Institute in Stuttgart
for its support in technical
matters and Wiley & Sons
which kindly allowed us to
quote from its reference book
“Cleanroom Design” by W.
Whyte (ISBN 0 472 94204 9).

Festo Singapore
Jiang Hong, Christian Burdin,
Edward Gasper
Festo Germany
Robert Strommer

3

Contents
Chapter 1 – Introduction of Cleanroom
1.1

Introduction of Cleanroom . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

1.2

Definition of Cleanroom . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

1.3

Classification of Cleanrooms . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 – 11

1.4

Cleanrooms for Different Industries . . . . . . . . . . . . . . . . ....
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